Laboratory Q09 - Deposition and Reactive Ion Etching
Paragrafo
Immagine
Lab Q09 is dedicated to quantum superconductive materials and device technologies such as the Voltage Standard, superconductive detectors, mixers and resonators. It includes a DC sputtering, Leybold RF sputtering, electron gun evaporator, and Deep Reactive Ion Etching Oxford PlasmaLab 100 Cobra.
The laboratory is particle-controlled class 10000 (ISO 7).