Laboratory Q09 - Deposition and Reactive Ion Etching
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Q09 Deposition and RIE

Lab Q09 is dedicated to quantum superconductive materials and device technologies such as the Voltage Standard, superconductive detectors, mixers and resonators. It includes a DC sputtering, Leybold RF sputtering, electron gun evaporator, and Deep Reactive Ion Etching Oxford PlasmaLab 100 Cobra.

The laboratory is particle-controlled class 10000 (ISO 7).

Contacts

Natascia De Leo
E-mail
n.deleo@inrim.it