Laboratory Q013 - Semiconductors
Paragrafo
Immagine
Lab Q013 is a controlled atmosphere environment (ISO 7) of approximately 100 square metres that includes a Molecular Beam Epitaxy with AFM in ultra-high vacuum, a sputtering for magnetic materials, two Rapid Thermal Annealing furnaces, two thermal evaporators, a PECVD reactor, a Plasma etcher, a chemical fume hood for cleaning substrates and producing silicon nanostructures, and a Woollam ellipsometer.