The sector develops prototypes of nanoscale length standards through the selective infiltration of copolymers with alumina by Atomic Layer Deposition. These nanoscale length standards are used for the calibration of AFM and SPM microscopes and for Total Reflection X-ray Fluorescence (TXRF) techniques. This activity is carried out in collaboration with the X-ray Spectroscopy group of the BESSY II Synchrotron of PTB in Berlin and with the NICE-MSI Mass Spectrometry Center of NPL.